| Weight | 98.992 g/mol |
|---|---|
| Formula | Cl2Si |
| Hydrogen Acceptors | 0 |
| Hydrogen Donors | 0 |
| Aromatic Rings | 0 |
| Rotatable Bonds | 0 |
DICHLOROSILANE (4109-96-0)
SiH2Cl2
Score:
#194 in Materials science
,
#1332 in Physics
,
#3866 in Chemistry
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- Preparation of chemically derivatized platinum and gold electrode surfaces. Synthesis, characterization, and surface attachment of trichlorosilylferrocene, (1,1'-ferrocenediyl)dichlorosilane, and 1,1'-bis(triethoxysilyl)ferrocene (Journal of the American Chemical Society, 1978)
- Adsorption and desorption kinetics for SiH2Cl2 on Si(111) 77 (Journal of Vacuum Science and Technology, 1992)
- Chemical processes in vapor deposition of silicon. I. Deposition from dichlorosilane and etching by hydrochloric acid (Journal of The Electrochemical Society, 1975)
- Selective epitaxial silicon growth in the 6501100 C range in a reduced pressure chemical vapor deposition reactor using dichlorosilane (Applied Physics Letters, 1989)
- Atomic layer epitaxy of silicon by dichlorosilane studied with core level spectroscopy (Journal of Vacuum Science and Technology, 1992)
- Selective lowpressure chemical vapor deposition of Si1xGex alloys in a rapid thermal processor using dichlorosilane and germane (Applied Physics Letters, 1990)
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Predict GHS Hazards for Any Chemical in silico.
Including Acute Oral Tox, Skin Sensitization, Eye Irritation, Aquatic Tox, & more. - H220: Extremely flammable gas
Danger Flammable gases - Category 1 - H314: Causes severe skin burns and eye damage
Danger Skin corrosion/irritation - Category 1A, B, C - H330: Fatal if inhaled
Danger Acute toxicity, inhalation - Category 1, 2 - SiH2Cl2
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SMILES[Si](Cl)Cl
-
InChIKeyBUMGIEFFCMBQDG-UHFFFAOYSA-N
- Pubchem - DICHLOROSILANE
- Wikipedia - Dichlorosilane
Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS:NH3 (i.e.
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