| Weight | 297.828 g/mol |
|---|---|
| Formula | F6W |
| Hydrogen Acceptors | 0 |
| Hydrogen Donors | 0 |
| Aromatic Rings | 0 |
| Rotatable Bonds | 0 |
Tungsten hexafluoride (7783-82-6)
Score:
#171 in Materials science
,
#1226 in Physics
,
#3511 in Chemistry
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- Studies on the Failure of the First Born Approximation in Electron Diffraction. IV. Molybdenum- and Tungsten Hexafluoride. (Acta Chemica Scandinavica, 1966)
- Mechanism for chemical-vapor deposition of tungsten on silicon from tungsten hexafluoride (Journal of Applied Physics, 1988)
- Batch reactor kinetic studies of tungsten LPCVD from silane and tungsten hexafluoride (Journal of The Electrochemical Society, 1996)
- Coriolis constants of spherical-top molecules from low-temperature infrared studies of vapor band contours: Application to the force field of tungsten hexafluoride (Journal of Molecular Spectroscopy, 1973)
- The Effects of Chemical Oxide on the Deposition of Tungsten by the Silicon Reduction of Tungsten Hexafluoride (Journal of The Electrochemical Society, 1987)
- The electron and fluoride affinities of tungsten hexafluoride by ion cyclotron resonance spectroscopy (Chemical Physics, 1979)
-
Predict GHS Hazards for Any Chemical in silico.
Including Acute Oral Tox, Skin Sensitization, Eye Irritation, Aquatic Tox, & more. - H280: Contains gas under pressure; may explode if heated
Warning Gases under pressure - Compressed gas, Liquefied gas, Dissolved gas -
SMILESF[W](F)(F)(F)(F)F
-
InChIKeyNXHILIPIEUBEPD-UHFFFAOYSA-H
- Pubchem - Tungsten hexafluoride
- Wikipedia - tungsten hexafluoride
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is the inorganic compound of tungsten and fluorine with the formula WF6. This corrosive, colorless compound is a gas under standard conditions, with a density of about 13 g/L (roughly 11 times heavier than air.), WF6 is one of the heaviest known gases under standard conditions. WF6 gas is most commonly used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition upon decomposition, molecules of WF6 leave a residue of metallic tungsten.
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Tungsten hexafluoride
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